For aqueous CMP slurries, preferred fillers are water-soluble. Examples include fillers made of organic water-soluble materials, such as saccharides, polysaccharides, e.g., starch, dextrin and cyclodextrin, lactose, mannitol, etc., celluloses, e.g., hydroxypropyl cellulose, methyl cellulose, etc.,...
final pH of about 4 1G1 wt. % of a pH 9.5 aqueous dispersion of titanium dioxide (120 nm mean particle size), 0.05 wt. % 4-HOT, and about 1 molar equiv. ascorbic acid relative to 4-HOT; final pH of about 4 The data in FIG. 1 demonstrate that compositions of the invention (1D...
The anionic and cationic polymers may have substantially any suitable molecular weights and need not have the same molecular weight or even similar molecular weights. For example, the anionic and cationic polymers may have an average molecular weight of about 200 g/mol or more (e.g., about 1,...
water soluble materials and an insoluble phase material (e.g., mineral oil). More preferably, the plurality of microelements are selected from entrapped gas bubbles and hollow core polymeric materials uniformly distributed throughout the polishing layer. Preferably, the plurality of microelements have...
Given the above, an unexpected finding of the present invention is that enhanced zeta potential in water, and enhanced removal rates for slurries with cationic particles, such as CeO2, can be achieved in a very low surface energy pad by selective addition of a small percentage of a fluorinated...
(a) Local planarization with a final global step height along the density interaction distance (or “planarization length” or “global planarization distance”; in short—“CMP Range”) between locations with large coverage differences. (b) Typical cross-section showing copper dishing, in the case...