The chemical composition of silicon nitride and silicon oxynitride films, as grown by low-pressure chemical vapour deposition, can be established using Rutherford backscattering and Auger electron spectroscopy. It is demonstrated that a deviating stoichiometry at the surface or at the interface of such...
EA-CR series silicate composition rapid analyzer is designed for the silicate industry that has long used gravimetric method, volumetric method, spectrophotometric method, flame photometric method and atomic absorption photometric method to combine chemical analysis of materials. The ...
The kinetics of the etching of silicon in the system , , and was studied as a function of the composition of the etchant at 25°C. A triaxial plot of the etch rate vs. composition of the etchant shows two extreme modes of behavior. In the region of high nitric acid compositions, etc...
The invention relates to an aqueous composition useful for polishing silica and silicon nitride on a semiconductor wafer and a method for polishing silica and silicon nitride using this composition. The composition of the invention comprises, in percent by weight, from 0.01 to 5% of carboxylic acid...
The present invention provides an aqueous composition useful for polishing silica and silicon nitride on a semiconductor wafer comprising by weight percent 0.01 to 5 carboxylic acid polymer, 0.02 to 6 abrasive, 0.01 to 10 polyvinylpyrrolidone, 0.005 to 5 cationic compound, 0.005 to 5 zwitterionic co...
The study reveals that the use of submicron size powder enhances the sintering process. In this investigation, effect of chemical composition on sintering and mechanical/thermomechanical properties has been studied. It was found that the densification process is dependent on the Al 2 O 3 /SiO 2 ...
The variation in chemical composition has also been studied using an EDX analysis during the in situ experiment. It has been concluded that Si atoms diffuse into graphite, react with carbon, and form SiC crystals.关键词:in situ heating experiment HREM EDX analysis chemical reaction SiC ...
The first band on the silicon collector is a region of intense carbon deposition, which is centered directly under the region of intensive plasma exposure and consists of great many irregularly formed grains. The average deposition thickness is 50–60 μm, but in some areas it is up to 140...
1 Chemical Composition The chemical composition refers to the chemical constituents. Various chemical compositions result in different properties. For example, with the increase of carbon content, the strength, hardness and toughness of carbon steel will change; carbon steel is easy to rust, so stainl...
Lithologic composition of the Earth's continental surfaces derived from a new digital map emphasizing riverine material transfer [1] A new digital map of the lithology of the continental surfaces is proposed in vector mode (n ≈ 8300, reaggregated at 0.5° × 0.5° resolution) for... HH D...