CONSTITUTION:The difference of temperature at respective cavities 3, disposed on respective sections of a template 5 by means of heaters 7 inserted into a plurality of openings 6 disposed in templates 5 and running close to the cavities 3 and communicated with the outside and having the heat ...
In the assembling of a probe card 3' with built-in heaters, a substrate 3a is put on an assembling base to apply heating currents through the heater wires 6, and the temperature of the substrate 3a is monitored by a temperature sensor 4 to keep the substrate 3a at a predetermined high ...
Then, a number of panels with the built-in heaters 10 are arranged for use in heating floors or walls of a house and electric power is supplied thereto with connectors 16 and 17 connected in parallel Heat from the semiconducting heating element is transferred to the heat transfer plate, and...
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An improved double-layered ceramic heater, which is used for heating a semiconductor silicon wafer mounted thereon in the processing of semiconductor devices, is proposed to be freed from the problems in the prior art ceramic heaters in ... N Kawada,Y Kubota,K Harada,... 被引量: 46发表: ...
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