Because a thick airfoil does not have good aerodynamic performance, the geometry detail such as a curvature should be decided to improve its aerodynamic efficiency. In authors’ previous study [3], design optimization procedure is considered for the initial layout (Fig. 2a–d). Airfoil geometries...
Silicon cantilever was used throughout the study with the nominal tip radius of 10 nm curvature. All scans were performed in air, at room temperature. Height and phase contrast images were recorded simultaneously with a resonance frequency between 250 and 300 kHz and a scan angle of 0˝. ...