Linear mass or gas micro-sensors are based on detecting a shift in the response frequency as associated with the deposited mass. To enhance the sensitivity of these sensors, it has been suggested to relate the deposited mass to a change in the response amplitude over a specified hysteretic ...
N/MEMSMass-sensingNonlinear dynamicsBasin of attractionBifurcationDetectionQuantificationLocalizationThis paper investigates an alternative mass-sensing technique based on nonlinear micro-/nanoelectromechanical resonant sensors. The proposed approach takes advantage of multi-stability and bifurcations of the ...
We report on the piezoresistive method for detecting stability loss events in microelectromechanical sensors based on bifurcation. The method involves measuring the resistivity changes of an entire beam to detect snap-through transitions in an electrostatically actuated, bistable double-clamped crystalline ...
et al. A new sensitivity enhancement scheme for resonant mass sensors based on 2:1 internal resonance bifurcation topology tuning. Nonlinear Dyn (2025). https://doi.org/10.1007/s11071-024-10693-w Download citation Received13 August 2024 Accepted19 November 2024 Published27 January 2025 DOIhttps:...
To obtain the fixed points and study the local and global bifurcational behavior of the switch, a mass-spring model has been utilized and adjusted so that to have similar static/dynamic characteristics with those of Euler-Bernoulli beam model (in the first mode). Using 1-DOF model, ...
Low power, integration into a microchip design, and low cost are a couple of advantages of EA-MEMS-CRs. Resonator sensors are coated for specimen recognition. The sensing principle is based on specimen particles bonding with the coating and increasing the mass of the EA-MEMS-CR. This change ...
Bifurcation MEMS sensorsMechanical-thermal noiseElectrical-thermal noiseMass sensitivityIn this work, we investigate and quantify intrinsic noise sources in electrostatic MEMS and study their impact on the mass sensitivity of bifurcation-based inertial sensors. Experiments are carried out to measure the ...
Today, most resonant mass sensors utilize chemomechanically-induced shifts in the linear natural frequency for detection. In this paper, an alternative, amplitude-based sensing approach, which exploits dynamic transitions across saddle-node bifurcations that exist in a microresonator's nonlinear frequency ...
electrostatic MEMSgas sensorsbifurcation-based sensingbinary detectionA novel electrostatic MEMS gas sensor is demonstrated. It employs a dynamic-bifurcation detection technique. The sensor detects ethanol vapor in a binary mode, reporting ON-state (1) for concentrations above a preset threshold and OFF...
One problem is creating devices that can function across a broad spectrum of frequencies and produce sufficient power for wireless sensors and nodes. Some studies explore the revolutionary design approach of a MEMS energy harvester based on a four-leaf clover (FLC) shape that can utilize many ...