AZ P4620 Photoresist数据包说明书
AZ P4620 Photoresist
AZ4620如何显影？要注意什么？曝光了45s,胶厚5um,但是显影了140s，只显影了3um，延长显影时间也没有...
Platingheight:7.0um,Plating:25deg./30min. OptitracCoat/Bake Coat:StaticdispenseonSilicon TargetFilmThickness:12µm Softbake:110°Chotplate/80sec.fullcontact Exposure:Ultratech1500ghlineStepper Develop:AZ ® 300MIFcontinuoussprayfor200sec.@23°C ...