In the CMP, SiO2@TiO2 core–shell abrasives were developed, and the CMP slurry included the developed abrasives, sodium carbonate, hydrogen peroxide and sorbitol. After photocatalytic CMP, the surface roughness Sa of quartz glass is 0.185 nm, with a scanning area of 50 × 50 μm2, and the...
The constant-volume specific heat, the entropy, the phonon contributions to internal energy and Helmholtz free energy, and the atomic temperature factors of α-quartz and stishovite, two allotropic forms of SiO 2 , are calculated as a function of temperature from ab initio phonon band structures...
In order to find out the details of microscopic structure of incommensurate (IC) phase in quartz, we studied numerically the time correlation in the atomic motion and the static pattern of the structure at different temperatures. The analysis of temperature dependence of the numerical data revealed...