In-situ wavefront sensing performed at the optics' operating wavelength (at-wavelength metrology) can be used not only to optimize the performance of X-ray optics, but also to correct and minimize the collective distortions of upstream beamline optics (e.g., monochromator, windows, etc.). ...
These in-situ and at-wavelength metrology methods can be used not only to optimize the performance of X-ray optics, but also to correct and minimize the collective distortions of upstream beamline optics, including monochromators, and transmission windows. An overview of at-wavelength metrology ...
The purpose was to compare the primary trace-moisture standards developed by four national metrology institutes in the range of 10 ppb to 2 ppm, and a commercially-available CRDS-based moisture analyzer was selected as the transfer measurement device [17]. An important result of this comparison ...
A gas detector system was implemented to monitor the absolute photon flux at the insertion device beamline of the Metrology Light Source. This system should overcome the drawbacks in the use of traceably calibrated semiconductor photodio... H Kirschner,H Kaser,A Gottwald - 《Journal of Physics ...
Interferometric phase microscopy, also called digital holographic microscopy, provides quantitative optical thickness measurements for biological studies [1] and high-accuracy profiling in metrology and surface inspection. In this technique, the quantitative phase of the light interacting with the sample is ...
water windowUVat-wavelength metrologyDue to the unusual behaviour of its optical constants the first transition element Sc with atomic configuration (3p~64s~23d) is a very attractive candidate for multilayer coatings optimised for the anomalous dispersion region of the 3p-3d transition around 28 eV...
at‐wavelength metrologypolarimetryreflectivitydiffraction gratingsXUV optical elementsA technology center for the production of high-precision reflection gratings has been established. Within this project a new optics beamline and a versatile reflectometer for at-wavelength characterization of UV- and XUV-...
In-situ wavefront sensing performed at the optics' operating wavelength (“at-wavelength” metrology) can be used not only to optimize the performance of X-ray optics, but also to correct and minimize the collective distortions of upstream beamline optics (e.g., monochromator, windows, etc.)....
In recent years, significant progress has been made to improve optic testing and optimization techniques, especially those using X-rays for so-called at-wavelength metrology. These in-situ and at-wavelength metrology methods can be used not only to optimize the performance of...
At-wavelength metrology of X-ray optics plays a crucial role in evaluating the performance of optics under actual beamline operating conditions, enabling in situ diagnostics and optimization. Techniques utilizing a wavefront random modulator have gained increasing attention in recent years. However, ...