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光罩傳輸盒 / 光罩傳送盒 / 光罩自動化傳輸盒 / Reticle SMIF Pod / RSP150,高潔淨度可杜絕空氣中的汙染,確保6吋光罩在製程站間運送與儲存的安全防護,應用於自動化機台。ASYST ASML Pod適用於ASML曝光機。 吋別 材質 產品編碼 充氣功能 金屬遮蔽 裝箱數 ASYST ASML Pod ABS RSP-A-A x x 4 PCS ASYSYT ...
Reticle SMIF Pod(RSP 150)-ASYST ASML Pod, Contamination proof, assure safety of 6” photomask during transfer and storage between station and station. Applicable for ASML exposure machine. Reticle SMIF Pod(RSP 150) Able to install RFID Reticle SMIF Pod(RSP 150) Description of Mount Barcode Ret...
Asyst LPT-2200 SMIF Pod used Manufacturer: Asyst Model: LPT-2200 Portable SMIF pod that can accompany any cassette to cassette processing system. Specifications: San Jose, CAClick to Request Price Trusted Seller Asyst MOCA port used Manufacturer: Asyst AsiaClick to Request Price Trusted Seller ...
ASYST SMIF LPT2200 是由 Asyst Technologies 公司推出的一款晶圆传输系统,旨在实现半导体制造过程中晶圆的自动化、高效、安全传输。 主要特点: 高精度传输:采用先进的运动控制技术,确保晶圆在传输过程中的精确定位和对准,提高生产效率和产品质量。 兼容性强:设计用于集成 SMIF-Pod 晶圆盒的加载和卸载,适用于多种 200...
提供ASYST LPI 2200 9700-4330-01出售 SMIF 价格:5000元/个 最小采购量:不限 主营产品:维修 供应商:上海海德汉电子维修有限公司 所在地:中国 联系人:国先生 联系电话 点此询价 买家还在看 特灵三级离心机抽气装置特灵自动抽气装置 日立变频器维修 报警代码修理 运行无输出......
273 Asyst Crossing Automation Brooks 4001-1354-01 Asyst 4001-1354-01, SMIF Pod, Wafer Cassette, 150mm, Hoop 274 Asyst Crossing Automation Brooks 4001-6927-03 Asyst 4001-6927-03 Cassette Platform, Indexer, KT, 200MM, SMIF 275 Asyst Crossing Automation Brooks 4002-4882-01 Crossing Automation As...
光罩传输盒 / 光罩传送盒 / 光罩自动化传输盒 / Reticle SMIF Pod / RSP150,高洁净度可杜絕空气中的污染,確保6英寸光罩在制程站间运送与储存的安全防护,应用于自动化机台。ASYST NIKON Pod适用于NIKON曝光机。 寸別材质产品编码充气功能金属遮蔽装箱数 ...
Standard Mechanical Interface Pods (SMIF) pods) are in general comprised of a pod door which mates with a pod shell to provide a sealed environment in which wafers may be stored and transferred. One type of pod is a front opening unified pod, referred to as FOUP10, in which the pod doo...
WO1999033726A11999-07-08SMIF POD DOOR AND PORT DOOR REMOVAL AND RETURN SYSTEM GB189727569A Other References: Mihir Parikh, et al., SMIF: A Technology for Wafer Cassette Transfer in VLSI Manufacturing, (07/84), Solid State Technology, pp. 111-115. ...