Before we begin, I’d like to caution listeners that comments made by management during this conference call will include forward-looking statements within the meaning of the Federal Securities Laws. These forward-looking statements involve material risks and uncertainties. For a discussion of risk fa...
this move could have significant implications for ASML, which has already faced restrictions on exporting its most advanced systems to China. ASML receives as much as49% of its revenuefrom China, meaning that additional export regulations could significantly reduce revenues if licenses aren't approved...
At least two alignment markers on the wafer are measured (W1 and W2), meaning that their XY position is determined with respect to the reference markers on the TIS fiducials. This determines to what extent the wafer is horizontally rotated (Rz) with respect to the scan direction (y), ...
Any term used in the Specification and/or in the Claims and expressly given a meaning in the Specification and/or Claims in the present application shall have that meaning, regardless of any dictionary or other commonly used meaning for such a term. It is not intended or necessary for a ...
The alignment sensor 10 is an off-axis sensor meaning that it illuminates the alignment marker and detects the reflected light directly, rather than through the projection system PL. The alignment sensor 10 may be provided at the exposure station or at a separate measurement station or both. In...
Moreover, applicants do not intend for any term in the specification or claims to be ascribed an uncommon or special meaning unless explicitly set forth as such. Further, the scope encompasses present and future known equivalents to the components referred to herein by way of illustration. As ...
The term ‘comparator’ as used herein is not intended to be interpreted as being limited to an electronics device which compares two voltages or currents then switches an output, but instead is intended to be interpreted more generally as meaning an apparatus which compares two sets of data (...
1.A method of determining at least one parameter of an object model used in a device manufacturing process, the object model providing information about a position of an object, the object having a plurality of alignment marks with desired positions that are known, the method comprising:receiving...