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International Classes: H01L23/32; B23K20/02; H01L21/00; H01L21/60; H01L21/603; (IPC1-7): B23K20/02; H01L21/00; H01L21/603 European Classes: B23K20/02D; H01L21/00S2T; H01L21/603 View Patent Images: Download PDF EP0219408 PDF help ...