or a basic compd., or both of these are added to a reflection preventing film material consisting of a crosslinking agent and a solvent, and the addition is controlled according to the acidity of a chemically amplifying resist to be used on the reflection preventing film, namely, according ...
抗反射涂层(Anti-Reflection Coating, ARC)是旋涂于光刻胶与Si衬底界面处以吸收光刻反射光的物质[1] 。 抗反射涂层主要包括:底部抗反射涂层、顶部抗反射涂层、可以显影的底部抗反射涂层、旋涂的含Si抗反射涂层、碳涂层等。 底部抗反射涂层(Bottom Anti-Reflection Coating, BARC)是位于Si衬底和光刻胶之间的涂层。主...
PROBLEM TO BE SOLVED: To obtain a reflection-protecting film material having high dimensional accuracy and productivity, capable of being removed together with a resist film and forming a resist pattern in good reproducibility and useful for underlayer reflection-protecting films of chemical amplification...
Anti-reflective coating material 优质文献 相似文献Material comprising an anti-reflective coating on a flexible glass substrate A material is disclosed which is suitable for reducing the reflection of information displays such as a CRT, LCD, plasma tube, etc., and is characterised by an improved pen...
Fornormalincidence,theFresnel reflectioncanbereducedtozeroif )4/(4/ 0 AR nλλ= airsAR nnn= DielectricmaterialRefractive index Transparency range SiO2(Silica)1.45>0.15μm Al2O3(alumina)1.76>0.15μm TiO2(titania)2.50>0.35μm Si3N4(siliconnitride)2.00>0.25μm ZnS(zincsulphide)2.29>0.34μm ...
the choice of substrate material dictates the deposition temperature of the AR coating. For narrowband Anti-Reflection coatings, the optical performance is similar for both low and high temperature depositions. However, the performance of a broadband AR Coating will vary depending on the deposition te...
or a basic compd., or both of these are added to a reflection preventing film material consisting of a crosslinking agent and a solvent, and the addition is controlled according to the acidity of a chemically amplifying resist to be used on the reflection preventing film, namely, according ...
Single-layer Anti-reflection Coatings In the simplest case, an anti-reflection thin-film coating designed for normal incidence consists of a single quarter-wave layer of a material the refractive index of which is close to the geometric mean value of the refractive indices of the two adjacent me...
Anti-reflective materials such as bottom anti-reflective coatings (BARC's) and sacrificial light absorbing materials (SLAM) may be made more effective at preventing coherent light or electron beam reflection from a substrate by including in the anti-reflective material an additive to alter the radiat...
Anti-reflection Coating1. Single Layer MgF2 AR coating Applied to materials with refractive indices from 1.45 to 2.4. The most popular antireflection coating for visible. They are insensitive to the change of incidence angles. Single layer MgF2 coaitng Ravg<2%@400~700nm, 0deg.incidence 2. ...