Thin films of hydrogenated amorphous silicon containing nanocrystalline silicon inclusions (a/nc-Si:H) have been synthesized in an RF capacitively coupled PECVD system using a mixture of hydrogen diluted silane and helium, under deposition conditions at the edge of powder formation within the plasma....
Hydrogenated amorphous silicon has enabled the active matrix liquid crystal display to dominate the flat panel display market and indeed has supplanted the cathode-ray tube as the leading display technology. This is the triumph of manufacturability over performance. Hydrogenated amorphous silicon thin-fil...
Studies of the photoelectrical and optical properties were done on hydrogenated amorphous silicon (a-Si:H) films in order to examine the possibility for construction of an efficient sensor for He–Ne (632 nm) laser light detection. Films with various thicknesses were prepared by plasma-enhanced ...
Mixed-phase hydrogenated silicon oxide (SiOx:H) is applied to thin-film hydrogenated amorphous silicon germanium (a-SiGe:H) solar cells serving as both p-doped and n-doped layers. The bandgap of p-SiOx:H is adjusted to achieve a highly-transparent window layer while also providing a strong...
This letter reports100nmchannel length vertical thin-film transistors (VTFTs) in hydrogenated amorphous silicon(a-Si:H)technology. The channel length is defined by means of a dielectric film thickness, realized by an anisotropic reactive ion etching process to yield a 90° vertical transistor struct...
Elastic properties, intrinsic and photoinduced stress in hydrogenated amorphous-silicon thin films with different hydrogen content. All device-quality hydrogenated amorphous-silicon (a-Si:H) thin films on a substrate exhibit intrinsic compressive stress, induced primarily during growth... Spanakis,E.,Str...
www.nature.com/scientificreports OPEN Scattering effect of the high- index dielectric nanospheres for high performance hydrogenated received: 30 March 2016 accepted: 04 July 2016 Published: 26 July 2016 amorphous silicon thin-film solar cells Zhenhai Yang1, Pingqi Gao1, Cheng Zhang2, ...
Effect of Microwave Pulse on the Optical Properties of Hydrogenated Amorphous Silicon Thin Films Deposited by Electron Cyclotron Resonance Plasma Lee Ju-Hyeon et al., Effect of microwave pulse on the optical properties of hydrogenated amorphous silicon thin films deposited by electron cyclotron ... J...
Impact of series and shunt resistances in amorphous silicon thin film solar cells In this paper hydrogenated amorphous silicon (a-Si:H) thin film solar cells have been investigated using advanced simulation tools and the obtained electri... M Fortes,E. Comesana,JA Rodriguez,... - 《Solar Ener...
A novel technology for manufacturing high-performance hydrogenated amorphous silicon (a-Si:H) thin-film transistors (TFTs) is developed in this letter. In the bottom gate light-shield a-Si:H TFT structure, the side edge of a-Si:H island is capped with extra deposition of heavily phosphorous...