smtsm, o,tmfw,1hw0,0hw,npwm, ph,,,bhaa,nsadenddtbo,tnbr,earsceposenpcsteiicvdteeilrvyae.tliHyon.eHroef,etrwhepe, wifsapbdiresicfidanteeiofdinnaemsdethtahesostduh.me soufmwhoaf nwdh tahned the Al sidewall thickness of 100 nm, based on a consideration of the fabrication method. ...