一体化刻蚀技术(all in one etch)从字面上也大致能猜个大概,其实可以理解为多道刻蚀工艺的结合,一...
逻辑方面最常见的就是 Metal hard mask的All in one etch,如图,可以同时一步完成trech和via的etch。
Trenches are etched into the dielectric layer through a trench mask, wherein the etching the trenches completes and over etches the vias to widen bottoms of the vias. Tops of the trenches or vias are rounded.Yu ChengJunwen HuangHuiyuan Pei...
PROVIDE SUBSTRATE WITH DIELECTRICLAYERVIA MASKAND TRENCH MASK104ETCH PARTIAL VIAS108EXPOSE TRENCH MASK112ETCH TRENCHESAND OVER ETCH VIAS116ROUND TOPSOF TRENCHESOR VIAS120FILL VIASAND TRENCHES124PLANARIZE TO PLANARIZATION TARGET128FIG.1
Aim of this study was to design HEMA-free all-in-one self-etch model adhesives without phase separation, and to investigate their efficiency on extracted human teeth. Compositions of adhesives in mass% (1): UDMA (25), 4-META (20), H(2)O (0, 1, 2, 5, 10, 20, 35, and 45), ...
All of the self-etch systems (SE, S3 and G) exhibited water-tree patterns within the adhesive layer when immersed in water for three months. The etch-and-rinse system (SB) showed nanoleakage within the hybrid layer and the adhesive. 展开 关键词: Interface Self-etch adhesive Bond strength ...
Optimization of PET (Post Etch Treatment) steps to enlarge queue time and decrease defect counts in Ultra low-k material AIO (all in one) etch processes 来自 掌桥科研 喜欢 0 阅读量: 291 作者:Z Xu,CG Gai,J Huang 摘要: To reduce the RC interconnect delays and cross-talk noise associated...
Objectives To test the long-term in vitro bonding performance of "all-in-one" self-etch adhesives to dentine. Methods Adper Prompt (3M ESPE), Bond Force (Tokuyama), Brush & Bond (Parkell), iBond Self Etch (Heraeus Kulzer), OptiBond All-In-One (Kerr), and Xeno IV (Dentsply Caulk) ...
EDTA treatment followed by NaOCl application significantly reduced microleakage and improved the interfacial adaptation with Adper Easy One. CHX did not significantly affect the sealing ability of both one-step self-etch adhesives tested. 展开 关键词: Dye penetration pulp chamber dentin root canal ...
Influ- ence of adhesive application methods and rebonding agent application on sealing effectiveness of all-in-one self-etch- ing adhesives. J Esthet Restor Dent. 2013;25(5):326A343.Demirci M, Tuncer S, Tekce N, Erdilek D, Uysal O. Influence of adhesive application methods and rebonding ...