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1:30 Nanoparticle Composite Membranes: Versatile Materials for Future MEMS/NEMS Sensors and ActuatorsH. Schlicke, S. Kunze, H. Hartmann, T. Vossmeyer, Fraunhofer CAN, DE 1:50 Application of Templating for Upcycling Plastic WasteA. Gharpure, M. Kowalik, R. Rajagopalan, R. Vander Wal, Penn...
State-of-the-art reviews from leading experts in the field of MEMS/NEMS devices and technologies The subject is covered from different angles, including technology, device designs, processing aspects, materials properties, characterization, microstructural studies Broad coverage from technology fundamentals ...
Piezoelectric theory, mechanism, modeling, and simulation Piezoelectric MEMS (NEMS), design, modeling, fabrication, and applications Piezoelectric actuators, motors, sensors, transformers, and transducers. The design, development, and applications Piezoelectric energy harvesting, power generator, energy storage...
Aiming to shine a light on this new regime of advanced 3D microfabrication/nanofabrication, this review introduces the latest kirigami/origami-like 3D fabrication at the microscale/nanoscale. Various stimuli of kirigami/origami, such as capillary forces, residual stress, mechanical stress, and responsive...
摘要:Low-temperature assembly techniques are desirable for further evolving polymer-based microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS). Especially for systems containing biomolecules and cells, biologically benign processing techniques that meet strict design constraints (e.g....
Nanoelectrochemical systems (NEMS) are likely to augment the already established micro-electromechanical systems (MEMS). A related aspect pertains to molecular motors. In wiring systems,molecular motors are responsible for DNA transcription, cellular transport and muscle contraction. Newfabricated tools ...
MEMS/NEMSHighly efficient atomic force microscopy (AFM) cantilevers and an near-field scanning optical microscopy (NSOM) aperture array were fabricated using the functional Si 3N 4 and SiO 2 thin films for the micro electro mechanical systems (MEMS) and NEMS applications. In order to generate ...
Advanced MEMS/NEMS Processing for Improved Drug DeliveryR. Goodall
several materials such as glass, polymers: polycarbonate, polydimethylsiloxane, polymethylmethacrylate, and metals such as stainless steel, which are commonly used in the fabrication of biomedical devices, such as microfluidic technology, optical and fiber-optic sensors, and electro-chemical bio-sensors....