Van Spengen et al., “A Physical Model to Predict Stiction in MEMS,” J. of Micromechanics & Microengineering 12 (2002) pp. 702-713.W. Merlijn Van Spengen, R. Puers, and I. De Wolf, "A physical model to predict stiction in MEMS," Journal of Micromechanics and Microengineering, vol...
This work investigated whether stiction in MEMS could be decreased by applying rough thin inorganic ALD films. Test structures based on the cantilever-beam-array (CBA) method were fabricated and coated with 2–50 nm thick ALD layers varying in chemical nature and roughness: Al2O3, TiO2, MoN ...
and no requirement of lubrication in the system which also means lower impact on the environment. Since the friction in air bearings is dependent on air shear from motion, the friction when starting (at zero velocity) is zero and hence, there is no stiction in the system allowing it to hav...
This is because coupling interactions such as play and stiction can affect the kinematics of the microsystem, often in ways that are difficult to control and predict because of fabrication tolerances and surface forces1–3. The third challenge is to resolve single cycles of motion, as opposed to...
In practice, the pull-in effect causes significantly higher constraints as fabrication tolerances and safety margins need to be considered. Pull-in related effects, such as stiction, adhesion, electrical discharge and dielectric charging, are considered to be the primary causes of device failure for ...
A physical model to predict stiction in MEMS. J. Micromech. Microeng. 2002, 12, 702. [CrossRef] 23. Ramini, A.H.; Hajjaj, A.Z.; Younis, M.I. Tunable resonators for nonlinear modal interactions. Sci. Rep. 2016, 6, 34717. [CrossRef] 24. Jaber, N.; Ramini, A.; Younis, M....
Van Spengen, W.M.; Puers, R.; De Wolf, I. A physical model to predict stiction in MEMS.J. Micromech. Microeng.2002,12, 702. [Google Scholar] [CrossRef] Ramini, A.H.; Hajjaj, A.Z.; Younis, M.I. Tunable resonators for nonlinear modal interactions.Sci. Rep.2016,6, 34717. [...
where 𝑚𝑝mp is the total mass of the piston and the payloads, 𝐵𝑝Bp is the damping coefficient, 𝑓f is the stiction force, and 𝐹𝑒𝑥Fex is the external force produced by the atmosphere acting on the piston rod. Stiction force is ignored as an anti-stiction cylinder is ...
with special attention devoted to jump and pull-in dynamics. A theoretical single degree-of-freedom spring-mass model is derived. Classical numerical simulations are observed to properly predict the main nonlinear features. Nevertheless, some discrepancies arise, which are particularly visible in the re...
Due to the small size of the surgical robot, the micro-sensor should be based on MEMS technology while the size of sensitive element is under micrometer. We use a variety of integrated bit sensor for real-time monitoring to achieve sensor technology. The general wired network sensor to the ...