Van Spengen WM, Puers R, De Wolf M (2002) A physical model to predict stiction in MEMS. J Micromech Microeng 12:702–713W. M. Van Spengen , R. Puers and I. De Wolf "A physical model to predict stiction in M
This work investigated whether stiction in MEMS could be decreased by applying rough thin inorganic ALD films. Test structures based on the cantilever-beam-array (CBA) method were fabricated and coated with 2–50 nm thick ALD layers varying in chemical nature and roughness: Al2O3, TiO2, MoN ...
and no requirement of lubrication in the system which also means lower impact on the environment. Since the friction in air bearings is dependent on air shear from motion, the friction when starting (at zero velocity) is zero and hence, there is no stiction in the system allowing it to hav...
for the resonant case3. In practice, the pull-in effect causes significantly higher constraints as fabrication tolerances and safety margins need to be considered. Pull-in related effects, such as stiction, adhesion, electrical discharge and dielectric charging, are considered to be the primary cause...
semi-physical modeldynamic responseeffectiveness of the methodValve stiction is one of the most common equipment problems that can cause poor performance in control loops. Consequently, there is a strong need in the process industry for non-invasive methods that can not only detect but also ...
A physical model to predict stiction in MEMS. J. Micromech. Microeng. 2002, 12, 702. [Google Scholar] [CrossRef] Ramini, A.H.; Hajjaj, A.Z.; Younis, M.I. Tunable resonators for nonlinear modal interactions. Sci. Rep. 2016, 6, 34717. [Google Scholar] [CrossRef] Jaber, N.; Ra...
A physical model to predict stiction in MEMS. J. Micromech. Microeng. 2002, 12, 702. [CrossRef] 23. Ramini, A.H.; Hajjaj, A.Z.; Younis, M.I. Tunable resonators for nonlinear modal interactions. Sci. Rep. 2016, 6, 34717. [CrossRef] 24. Jaber, N.; Ramini, A.; Younis, M....
Due to the small size of the surgical robot, the micro-sensor should be based on MEMS technology while the size of sensitive element is under micrometer. We use a variety of integrated bit sensor for real-time monitoring to achieve sensor technology. The general wired network sensor to the ...
Further models developed in recent decades are represented by the non-parametric damper models that combine the experimental data processing and MR damper physics to derive the analytical equations in order to predict the damper behaviour. Among them, the neural network models are the most commonly ...