A new micromachined electrohydrodynamic (EHD) injection pump is presented. The pump mainly consists of two facing grids, which are micromachined from sdoi:10.1016/0924-4247(91)87118-MA. RichterA. PlettnerK.A. H
The fabricated device was regarded as an electrohydrodynamic (EHD) micropump, and has a pumping capacity of 4.5 μl/min herein. select article Thermomechanical tensile characterization of Ti–Ni shape memory alloy films for design of MEMS actuator Research articleAbstract only Thermomechanical tensile ...
EHD: electrohydrodynamic EO: electro-osmosis EOF: electro-osmotic flow GOD: glucose oxidase HF: hydrofluoric acid MEMS: microelectromechanical systems MHD: magnetohydrodynamic NMP: no moving part PAPP: p-aminophenyl phosphate PC: ploycarbonate PDMS: polydimethylsiloxane PE: polyethylene ...
A silicon micromachined electrohydrodynamic (EHD) injection pump for microsystem technology is presented. The pump consists of two opposed grids, which are micromachined from single crystal silicon and bonded together anodically. Pumping and static pressure generation was achieved with different polar fluids...
This paper discusses electrohydrodynamic pumping and issues concerning its use in micronsize scale systems. The fundamental operating principles of the EHD pump are outlined and examples of configurations which meet the requirement for inducing free electric charge are shown. The possible performance achiev...