A high sensitivity MEMS-based accelerometer with reduced cross-axis coupling is presented to achieve vibration detection. An enhanced mechanical structure topology with triangular force constraint distributing a
Design of the MEMS gravimeter The MEMS gravimeter has two distinct components—a monolithically etched silicon sensor with a high acceleration sensitivity; and an integrated capacitive readout scheme to measure the sensor’s output. Here, the design aspects of the core MEMS sensor will be discussed...
A resonant MEMS accelerometer with 56ng bias stability and 98ng/Hz1/2 noise floor 2019, Journal of Microelectromechanical Systems A high-sensitivity biaxial resonant accelerometer with two-stage microleverage mechanisms 2015, Journal of Micromechanics and Microengineering A high-resolution resonant MEMS ...
Therefore, only when the dynamic range and sensitivity are both effective,the accelerometer has practical significance and application value [18]. To resolve this contradiction, softening effect of the electrostatic negative stiffness can be applied to the design of high-performance resonant ...
A well-constructed mechanical enclosure design for a MEMS accelerometer will ensure that high quality vibration data for CbM is extracted from the monitored asset. The mechanical enclosure used to house a MEMS accelerometer needs to have a frequency response better than the integrated MEMS. This arti...
The sensitivity of the device is demonstrated through the tracking of Earth tides and recording of ground motion corresponding to a number of teleseismic events over several months. These results demonstrate that vibrating beam MEMS accelerometers can be employed for measurements requiring high levels of...
InvenSense’s 6-axis family of motion sensors with a 3-axis gyroscope and a 3-axis accelerometer on the same silicon die are the highest performance sensors in the market with the lowest noise, best temperature stability, and highest sensitivity accuracy. These key factors are key to create ap...
Cross-Axis Sensitivity 2% 1% 2× Temperature Range –40°C to +125°C –40°C to +125°C — Power Consumption (mA) 2.5 1 2.5x Standby Current (mA) — 0.225 —These noise improvements were also implemented on some high performance industrial triaxial MEMS sensors, as shown in Table 3....
The sensitivity of the accelerometer is measured with a phase lock loop (PLL) built using a lock-in amplifier (LIA)controlled with a computer program. The measured sensitivity is 22 Hz/g and the maximum resolution is smallerthan 5 mg (5Hz integration bandwidth). The results presented in this...
A high-sensitivity MEMS-based accelerometer. Lead. Edge 2014, 33, 1234–1242. [Google Scholar] [CrossRef] Krishnamoorthy, U.; Olsson, R.; Bogart, G.; Baker, M.; Carr, D.; Swiler, T.; Clews, P. In-plane MEMS-based nano-g accelerometer with sub-wavelength optical resonant sensor. ...