解析 答:深紫外光刻胶的曝光宽容度是剂量变化范围在 1%左右 结果一 题目 What is a typical dose e*posure latitude for a DUV resist?典型的DUV光刻胶曝光剂量的宽容度是多少 答案 答:深紫外光刻胶的曝光宽容度是剂量变化围在1%左右相关推荐 1What is a typical dose e*posure latitude for a DUV resist?
曝光量分布 1. On the basis of analyzing the effect of the S-curve parameter variation on the joint quality,the optimized interrelationship of the radian θ and the radius R used in the control model was established considering it to be optimal when the exposure dose distribution got an extremu...
On the base of the measurement of optical performance and the minimal exposure dose,we study its photolithography process. 通过改变SU-8光刻胶中PAG浓度获得含不同PAG浓度的各种改性SU-8光刻胶,在对其光学性能以及最小曝光剂量的测定基础上研究改性SU-8光刻胶的光刻工艺,借助于改性SU-8光刻胶的合理设计...