1)overlay[英][,??v?'le?][美][,ov?'le]套刻 1.This new file format solves the problem of overlay and provides the property for proximity effect correction.0开发环境实现了EDF格式文件的图形创建、结构体引用以及文件保存,同时增加了多层图形套刻和邻近效应修正数据处理的功能。 英文短句/例句 1.Syst...
套刻精度 alignment precision 释义 见:套刻: 套刻精度 alignment precision 随便看 雷达抗干扰 radar antiinterference; 雷达指示管 radar indicator tube; 雷达探测 radar detection; 雷达探测区 radar coverage; 雷达接收机 radar receiver; 雷达摄影 radar photography; 雷达摄影术 {摄} radar photography; 雷达操纵...
套刻性能 1. Overlay is one of key performances for modern lithographic projection systems with high-precision, a novel method for in-situ measuring the overlay performance of a lithographic system with the marks is presented. 套刻性能是现代高精度步进扫描投影光刻机的重要性能指标之一。3...
套刻性能 1. Overlay is one of key performances for modern lithographic projection systems with high-precision, a novel method for in-situ measuring theoverlay performanceof a lithographic system with the marks is presented. 套刻性能是现代高精度步进扫描投影光刻机的重要性能指标之一。
6) resharpen['ri:'ʃɑ:p(ə)n] 重刻 补充资料:套刻重合 分子式: CAS号: 性质:晶片上每一点定义的矢量,这是基片几何图形的矢量位置和套刻图形(可以由光致抗蚀剂组成)相应点矢量位置之间的差称作。=。 说明:补充资料仅用于学习参考,请勿用于其它任何用途。