MOCVDAnnealingCrystal structureElectrical propertiesOptical properties•The Mg-doped Ga2O3films were prepared on α-Al2O3(0001) substrates by MOCVD for the first time.•Structural, electrical and optical properties of the films as a function of Mg concentration and annealing were investigated.•...
The Mg-doped Ga2O3 (Ga2O3:Mg) films have been prepared on the alpha-Al2O3(0001) substrates by metal organic chemical vapor deposition (MOCVD). The Mg doping was varied from 0 to 10% (atomic ratio). The effect of annealing on the structural, electrical and optical properties of the ...