A. Herbj?rnr?dK. Schj?lberg-henriksenH. Angelsk?rM. LacolleJournal of Micromechanics & MicroengineeringA. Herbjornrod, K. Schjolberg-Henriksen, H. Angelskar, and M. Lacolle, "Resist evaluation for fabrication of diffrac- tive optical elements (DOEs) with sub-micron resolution in a MEMS...