The simultaneous supply of B2H6 and NH3 at a growth temperature of 1360 °C under a pressure of 100 mbar results in a rough surface, indicating 3D island growth, regardless of the V/III ratio. Furthermore, a significant decrease in growth rate is observed at high V/III ratios owing to ...
NH3The boron nitride (BN) thin films on Al2O3 substrates grown by chemical vapor deposition (CVD) using alternating supply of B2H6 and NH3 are investigated. A significant reduction in growth rates is observed when the growth temperature (Tg) is decreased from 1360 to 1140°C, indicating ...