Methods Focal field simulations. Focal field calculations were applied to investigate the effects of primary classical aberrations on the PSFs created by different binary PMs upon focusing the corresponding circularly polarized pupil function with a high NA objective. Thus, phase modulation experiments...
The higher-order static aberrations in the telescope are then measured with the Shack-Hartmann wavefront sensor.doi:10.1142/9789812817815_0037DANIEL R. NEALJUSTIN MANSELLAdaptive Optics for Industry and Medicing - Proceedings of the 2nd International Workshop. Edited by LOVE GORDON D. Published by ...
plane alignment. For example, the distance between each of the laser scanning units and the drum may vary slightly, resulting in slightly different color plane sizes, which cannot be reconciled by proper registration. The resultant effect is that somewhere on the page color aberrations will occur....
The present invention takes advantage of the second capability by, for example, correcting aberrations induced by the medium transversed by the radiation between its origin and the workpiece. Thus the phase conjugate radiation or invariant reference is not deviated by optical phase distorting media ...
where is a pitch between adjacent ridges or pitch of the interference fringe, and f(ARL, AR :ρ) differs depending on whether the hologram is of amplitude modulation type or phase modulation type. The optimum function of f is chosen depending each of these two types of the holograms. FIG...
The image pickup device 63 is used for taking the images of the grating mark on the reticle R and that on the reference mark plate FM, thereby determining the positional aberrations (ΔXe, ΔYe) of both marks. At the same time the interference fringe alignment system is activated through...
In this technique the marker remains stationary and the retarder is used to apply a well-known phase variation ψ(t) to the interference pattern in the pupil plane: I(k,t)=I0+I1 cos(φk−φ−k+ψ(t)) (13). In practice two forms of phase-modulation can be used: ...
the different coordinates of illumination points250aand250bwith respect to the actual axis of wafer100in the direction that it is being scanned. Other sources of measurement error that can produce a fixed phase difference between the illumination points are electrical delays and optical aberrations. ...
φ is optical phase delay, and (L) is the wavelength Lambda. It is plotted beneath each image for the three objects considered. The total modulation depth is set to (L)/2 for each object, in order to maximize the image contrast. The images are shown at the scan position corresponding ...
1. The present invention illuminates and collects the light over a very narrow field of view, so it does not suffer from off-axis aberrations present in the prior art; 2. The present invention samples the signal at a rate that is as high as necessary to meet the required accuracy (e.g...