PROBLEM TO BE SOLVED: To provide a wafer-heating member that can continuously reduce the temperature difference of a wafer surface within ±5°C for soaking even if film-forming gas, gas for etching, or disturbance operate, and a soaking method of the wafer using the wafer-heating...
With this geography-aided navigation, the certainty of relative position of the aircraft on a coordinate can be improved to be approximately ±91m. Also, three colors are used according to the altitude of the geographical structure 24 so that the danger of crash to the ground is ...
The most general angular decay distribution of the hadronic system in the decay of a polarized τ into one pseudoscalar plus a vector is calculated. Emphasis is put on τ decays in e + e − experiments where the neutrino escapes de... R Decker,E Mirkes - 《Zeitschrift für Physik C》...